Inventor
FUKATSU EIJI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “FUKATSU EIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
5 patentsUS7935217B2May 3, 2011
Substrate processing apparatus for treating substrate with predetermined processing by supplying processing liquid to rim portion of rotating substrate
DAINIPPON SCREEN MFG37 citations89
US7547181B2Jun 16, 2009
Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum
DAINIPPON SCREEN MFG19 citations82
US7384484B2Jun 10, 2008
Substrate processing method, substrate processing apparatus and substrate processing system
DAINIPPON SCREEN MFG18 citations82
US7246984B2Jul 24, 2007
Method and apparatus for transferring an article to be processed and processing apparatus
DAINIPPON SCREEN MFG7 citations73
US7503978B2Mar 17, 2009
Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position
DAINIPPON SCREEN MFG7 citations72