Inventor
MAEMORI SATOSHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MAEMORI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
8 patentsUS6605417B2Aug 12, 2003
Method for decreasing surface defects of patterned resist layer
TOKYO OHKA KOGYO CO LTD14 citations82
US6818380B2Nov 16, 2004
Method for the preparation of a semiconductor device
TOKYO OHKA KOGYO CO LTD4 citations62
US6777158B2Aug 17, 2004
Method for the preparation of a semiconductor device
TOKYO OHKA KOGYO CO LTD3 citations62
US6444394B1Sep 3, 2002
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD5 citations62
US8349549B2Jan 8, 2013
Resist surface modifying liquid, and method for formation of resist pattern using the same
TOKYO OHKA KOGYO CO LTD4 citations61
US7094924B2Aug 22, 2006
Method for decreasing surface defects of patterned resist layer
TOKYO OHKA KOGYO CO LTD1 citations51
US6677103B2Jan 13, 2004
Positive-working photoresist composition
TOKYO OHKA KOGYO CO LTD1 citations51
US7629105B2Dec 8, 2009
Positive photoresist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations39