Inventor
CHUA GEK SOON
SG15 patents
⚠️ This page may combine multiple inventors who share the name “CHUA GEK SOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
5 patentsUS7560199B2Jul 14, 2009
Polarizing photolithography system
CHARTERED SEMICONDUCTOR MFG9 citations83
US7867698B2Jan 11, 2011
Reticle system for manufacturing integrated circuit systems
CHARTERED SEMICONDUCTOR MFG2 citations56
US7923180B2Apr 12, 2011
Cross technology reticles
CHARTERED SEMICONDUCTOR MFG0 citations48
US7866224B2Jan 11, 2011
Monitoring structure
CHARTERED SEMICONDUCTOR MFG0 citations48
US7674562B2Mar 9, 2010
Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask
CHARTERED SEMICONDUCTOR MFG0 citations48
GLOBALFOUNDRIES SG PTE LTD
5 patentsUS9053269B1Jun 9, 2015
System and methods for OPC model accuracy management and disposition
GLOBALFOUNDRIES SG PTE LTD3 citations54
US9395621B2Jul 19, 2016
Pellicles and devices comprising a photomask and the pellicle
GLOBALFOUNDRIES SG PTE LTD0 citations46
US9286435B2Mar 15, 2016
System and methods for OPC model accuracy management and disposition
GLOBALFOUNDRIES SG PTE LTD0 citations44
US9673111B2Jun 6, 2017
Methods for extreme ultraviolet mask defect mitigation by multi-patterning
GLOBALFOUNDRIES SG PTE LTD0 citations43
US9257277B2Feb 9, 2016
Methods for extreme ultraviolet mask defect mitigation by multi-patterning
GLOBALFOUNDRIES SG PTE LTD0 citations43