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Inventor
KINCAL SERKAN
US
3 patents
⚠️ This page may combine multiple inventors who share the name “KINCAL SERKAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
2 patents
US12222050B2
Feb 11, 2025
Robust fluid coupling apparatus
ASML NETHERLANDS BV
0 citations
43
US11963285B2
Apr 16, 2024
Target material control in an EUV light source
ASML NETHERLANDS BV
0 citations
40
TEXAS INSTRUMENTS INC
1 patent
US7899571B2
Mar 1, 2011
Predictive method to improve within wafer CMP uniformity through optimized pad conditioning
TEXAS INSTRUMENTS INC
18 citations
77