Inventor
GANESAN RAJESH
US6 patents
⚠️ This page may combine multiple inventors who share the name “GANESAN RAJESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV SOUTH FLORIDA
3 patentsUS7672739B2Mar 2, 2010
System for multiresolution analysis assisted reinforcement learning approach to run-by-run control
UNIV SOUTH FLORIDA24 citations86
US7377170B2May 27, 2008
System and method for the identification of chemical mechanical planarization defects
UNIV SOUTH FLORIDA8 citations69
US7406396B2Jul 29, 2008
System and method for online end point detection for use in chemical mechanical planarization
UNIV SOUTH FLORIDA2 citations58