Inventor

SEKIHARA ISAMU

JP11 patents

⚠️ This page may combine multiple inventors who share the name “SEKIHARA ISAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

4 patents

US9362088B2Jun 7, 2016

Charged particle beam device and sample preparation method

HITACHI HIGH TECH CORP6 citations71

US7709062B2May 4, 2010

Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electronic device

HITACHI HIGH TECH CORP6 citations63

US7989766B2Aug 2, 2011

Sample inspection apparatus

HITACHI HIGH TECH CORP2 citations61

US9330883B2May 3, 2016

Charged particle beam device

HITACHI HIGH TECH CORP2 citations60

HITACHI LTD

2 patents

US6734687B1May 11, 2004

Apparatus for detecting defect in device and method of detecting defect

HITACHI LTD134 citations98

US7301146B2Nov 27, 2007

Probe driving method, and probe apparatus

HITACHI LTD8 citations73

HITACHI ULSI SYS CO LTD

2 patents

US6960765B2Nov 1, 2005

Probe driving method, and probe apparatus

HITACHI ULSI SYS CO LTD50 citations96

US6970004B2Nov 29, 2005

Apparatus for inspecting defects of devices and method of inspecting defects

HITACHI ULSI SYS CO LTD18 citations92

MUTO HIROYUKI

1 patent

US8455824B2Jun 4, 2013

Charged particle beam apparatus, and sample processing and observation method

MUTO HIROYUKI4 citations61

MADOKORO YUICHI

1 patent

US8552397B2Oct 8, 2013

Focused ion beam device and focused ion beam processing method

MADOKORO YUICHI3 citations55

SAKAMOTO KUNIO

1 patent

US8912487B2Dec 16, 2014

Charged particle beam device, position specification method used for charged particle beam device, and program

SAKAMOTO KUNIO0 citations31