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Inventor
ZHANG LISA Z
US
7 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG LISA Z”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MCNEIL ANDREW C
2 patents
US8925384B2
Jan 6, 2015
MEMS sensor with stress isolation and method of fabrication
MCNEIL ANDREW C
8 citations
82
US8927311B2
Jan 6, 2015
MEMS device having variable gap width and method of manufacture
MCNEIL ANDREW C
0 citations
51
LIN YIZHEN
2 patents
US8610222B2
Dec 17, 2013
MEMS device with central anchor for stress isolation
LIN YIZHEN
6 citations
71
US9003886B2
Apr 14, 2015
Microelectromechanical systems devices and methods for the fabrication thereof
LIN YIZHEN
2 citations
61
FREESCALE SEMICONDUCTOR INC
2 patents
US7943525B2
May 17, 2011
Method of producing microelectromechanical device with isolated microstructures
FREESCALE SEMICONDUCTOR INC
6 citations
61
US9573799B2
Feb 21, 2017
MEMS device having variable gap width and method of manufacture
FREESCALE SEMICONDUCTOR INC
0 citations
51
LI GARY G
1 patent
US8739627B2
Jun 3, 2014
Inertial sensor with off-axis spring system
LI GARY G
3 citations
56