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Inventor
ROBERTSON STEWART A
US
3 patents
⚠️ This page may combine multiple inventors who share the name “ROBERTSON STEWART A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ROHM & HAAS ELECT MAT
1 patent
US7781141B2
Aug 24, 2010
Compositions and processes for immersion lithography
ROHM & HAAS ELECT MAT
8 citations
82
GRAVES JOHN S
1 patent
US8428762B2
Apr 23, 2013
Spin coating modeling
GRAVES JOHN S
9 citations
76
GALLAGHER MICHAEL K
1 patent
US8911927B2
Dec 16, 2014
Compositions and processes for immersion lithography
GALLAGHER MICHAEL K
3 citations
58