Inventor
PETERSON KAREN
US9 patents
⚠️ This page may combine multiple inventors who share the name “PETERSON KAREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOFFMAN DANIEL J
3 patentsADVANCED ENERGY IND INC
3 patentsUS9524854B2Dec 20, 2016
Electrostatic remote plasma source system and method
ADVANCED ENERGY IND INC28 citations93
US9142388B2Sep 22, 2015
Capacitively coupled remote plasma source
ADVANCED ENERGY IND INC25 citations92
US10224186B2Mar 5, 2019
Plasma source device and methods
ADVANCED ENERGY IND INC25 citations88