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Inventor

GRILLEY RANDY

US5 patents
⚠️ This page may combine multiple inventors who share the name “GRILLEY RANDY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOFFMAN DANIEL J

3 patents
US8884525B2Nov 11, 2014

Remote plasma source generating a disc-shaped plasma

HOFFMAN DANIEL J91 citations97
US8723423B2May 13, 2014

Electrostatic remote plasma source

HOFFMAN DANIEL J56 citations97
US10225919B2Mar 5, 2019

Projected plasma source

HOFFMAN DANIEL J1 citations62

ADVANCED ENERGY IND INC

2 patents
US9524854B2Dec 20, 2016

Electrostatic remote plasma source system and method

ADVANCED ENERGY IND INC28 citations93
US9142388B2Sep 22, 2015

Capacitively coupled remote plasma source

ADVANCED ENERGY IND INC25 citations92