Inventor
KUO HUNG-MING
TW5 patents
Patents
5 patentsUS10747128B2Aug 18, 2020
Exposure method and exposure apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US9826615B2Nov 21, 2017
EUV collector with orientation to avoid contamination
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US11500299B2Nov 15, 2022
Exposure method and exposure apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US9587929B2Mar 7, 2017
Focus metrology method and photolithography method and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12523942B2Jan 13, 2026
Exposure method and exposure apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50