Inventor
OHKAWA YOUHEI
JP2 patents
Patents
2 patentsUS9971238B2May 15, 2018
Mask blank, phase shift mask, and production method thereof
DAINIPPON PRINTING CO LTD1 citations46
US9874808B2Jan 23, 2018
Mask blank, mask blank with negative resist film, phase shift mask, and method for producing pattern formed body using same
DAINIPPON PRINTING CO LTD0 citations46