Inventor

NAKATANI ATSUO

JP3 patents

Patents

3 patents

US10683867B2Jun 16, 2020

Vacuum valve, vacuum pump, and vacuum pumping system

SHIMADZU CORP1 citations59

US10599166B2Mar 24, 2020

Valve control device

SHIMADZU CORP0 citations48

US10400775B2Sep 3, 2019

Vacuum valve and vacuum pump

SHIMADZU CORP0 citations38