Inventor
HOFFMAN DANIEL
US22 patents
⚠️ This page may combine multiple inventors who share the name “HOFFMAN DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS7141757B2Nov 28, 2006
Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent
APPLIED MATERIALS INC23 citations90
US6667577B2Dec 23, 2003
Plasma reactor with spoke antenna having a VHF mode with the spokes in phase
APPLIED MATERIALS INC28 citations90
US7674353B2Mar 9, 2010
Apparatus to confine plasma and to enhance flow conductance
APPLIED MATERIALS INC8 citations83
US7618516B2Nov 17, 2009
Method and apparatus to confine plasma and to enhance flow conductance
APPLIED MATERIALS INC6 citations73