Inventor
SARKARY HOMI G
6 patents
Patents
6 patentsUS4248688AFeb 3, 1981
Ion milling of thin metal films
IBM77 citations91
US4410622AOct 18, 1983
Forming interconnections for multilevel interconnection metallurgy systems
IBM65 citations90
US4389294AJun 21, 1983
Method for avoiding residue on a vertical walled mesa
IBM17 citations73
US4109275AAug 22, 1978
Interconnection of integrated circuit metallization
IBM17 citations71
US4397079AAug 9, 1983
Process for improving the yield of integrated devices including Schottky barrier diodes
IBM10 citations70
US4238312ADec 9, 1980
Sputtering system for optimizing quartz deposition uniformity
IBM9 citations68