Inventor
LIN CHEN-YANG
TW15 patents
⚠️ This page may combine multiple inventors who share the name “LIN CHEN-YANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS11698592B2Jul 11, 2023
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11294292B2Apr 5, 2022
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12032302B2Jul 9, 2024
Method and device for cleaning substrates
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12085866B2Sep 10, 2024
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12393129B2Aug 19, 2025
Method and device for cleaning substrates
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11430671B2Aug 30, 2022
Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
(unassigned)
4 patentsUS6059049AMay 9, 2000
Air cylinder apparatus for a pneumatically driven power tool
31 citations91
US6047780AApr 11, 2000
Speed adjusting apparatus for a pneumatically driven power tool
36 citations91
US6024180AFeb 15, 2000
Cage device for a pneumatically driven power tool
29 citations91
US5992539ANov 30, 1999
Pneumatically driven power tool
48 citations91