Inventor
SUSAKI AKIRA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SUSAKI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS7157370B2Jan 2, 2007
Semiconductor device and method for manufacturing the same
EBARA CORP8 citations72
US7413983B2Aug 19, 2008
Plating method including pretreatment of a surface of a base metal
EBARA CORP2 citations61
US8357284B2Jan 22, 2013
Method for forming metal film
EBARA CORP0 citations50
US9633898B2Apr 25, 2017
Etching liquid, etching method, and method of manufacturing solder bump
EBARA CORP0 citations49
US7947156B2May 24, 2011
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations41