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Inventor
NONAKA HIDEYUKI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “NONAKA HIDEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
1 patent
US6012509A
Jan 11, 2000
Mechanism and method for holding a substrate on a substrate stage of a substrate treatment apparatus
TOKYO ELECTRON LTD
52 citations
85
SANYO ELECTRIC CO
1 patent
US5343484A
Aug 30, 1994
SHG (second-harmonic generation) device
SANYO ELECTRIC CO
7 citations
71