Inventor
SATOH HIDEKAZU
JP3 patents
Patents
3 patentsUS6268295B1Jul 31, 2001
Method of manufacturing semiconductor device
FUJITSU LTD62 citations94
US6017784AJan 25, 2000
Manufacture method of semiconductor device with suppressed impurity diffusion from gate electrode
FUJITSU LTD53 citations94
US6380014B1Apr 30, 2002
Manufacture method of semiconductor device with suppressed impurity diffusion from gate electrode
FUJITSU LTD40 citations91