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Inventor

NANDA ARUN KUMAR

US8 patents
⚠️ This page may combine multiple inventors who share the name “NANDA ARUN KUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LUCENT TECHNOLOGIES INC

5 patents
US6358785B1Mar 19, 2002

Method for forming shallow trench isolation structures

LUCENT TECHNOLOGIES INC26 citations91
US6110012AAug 29, 2000

Chemical-mechanical polishing apparatus and method

LUCENT TECHNOLOGIES INC34 citations91
US5641994AJun 24, 1997

Multilayered A1-alloy structure for metal conductors

LUCENT TECHNOLOGIES INC19 citations89
US5561083AOct 1, 1996

Method of making multilayered Al-alloy structure for metal conductors

LUCENT TECHNOLOGIES INC5 citations70
US5686359ANov 11, 1997

Titanium silicide process

LUCENT TECHNOLOGIES INC7 citations62

AGERE SYST GUARDIAN CORP

2 patents
US6500729B1Dec 31, 2002

Method for reducing dishing related issues during the formation of shallow trench isolation structures

AGERE SYST GUARDIAN CORP10 citations72
US6323126B1Nov 27, 2001

Tungsten formation process

AGERE SYST GUARDIAN CORP4 citations62

CHARTERED SEMICONDUCTOR MFG

1 patent
US6325709B1Dec 4, 2001

Rounded surface for the pad conditioner using high temperature brazing

CHARTERED SEMICONDUCTOR MFG56 citations93