Inventor
INOUE FUYUHIKO
US14 patents
⚠️ This page may combine multiple inventors who share the name “INOUE FUYUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
11 patentsUS6665054B2Dec 16, 2003
Two stage method
NIKON CORP79 citations97
US5617182AApr 1, 1997
Scanning exposure method
NIKON CORP49 citations96
US6160628ADec 12, 2000
Interferometer system and method for lens column alignment
NIKON CORP54 citations95
US6674512B2Jan 6, 2004
Interferometer system for a semiconductor exposure system
NIKON CORP25 citations92
US4971413ANov 20, 1990
Laser beam depicting apparatus
NIKON CORP41 citations92
US6724464B2Apr 20, 2004
Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method
NIKON CORP28 citations91
US6813022B2Nov 2, 2004
Interferometer system
NIKON CORP19 citations83
US6785005B2Aug 31, 2004
Switching type dual wafer stage
NIKON CORP17 citations83
US6509971B2Jan 21, 2003
Interferometer system
NIKON CORP17 citations83
US6714282B2Mar 30, 2004
Position detecting method optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method
NIKON CORP7 citations73
US11231608B2Jan 25, 2022
Optical component comprising liquid crystals in a blue phase and process for making such optical component
NIKON CORP0 citations43
NIPPON KOGAKU KK
3 patentsUSH1972HJul 3, 2001
Autofocus system using common path interferometry
NIPPON KOGAKU KK51 citations92
US4761561AAug 2, 1988
Laser beam scanning pattern generation system with positional and dimensional error correction
NIPPON KOGAKU KK38 citations91
USRE38176EJul 8, 2003
Scanning exposure method
NIPPON KOGAKU KK2 citations62