Inventor

GOETZE SVEN

DE2 patents

⚠️ This page may combine multiple inventors who share the name “GOETZE SVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XTREME TECHNOLOGIES GBMH

1 patent

US6815900B2Nov 9, 2004

Radiation source with high average EUV radiation output

XTREME TECHNOLOGIES GBMH29 citations87

XTREME TECHONOLGIES GMBH

1 patent

US7541604B2Jun 2, 2009

Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housings

XTREME TECHONOLGIES GMBH9 citations73