Inventor
VAN DEN BIGGELAAR PETRUS MARIN
NL8 patents
Patents
8 patentsUS7113256B2Sep 26, 2006
Lithographic apparatus and device manufacturing method with feed-forward focus control
ASML NETHERLANDS BV35 citations91
US7295283B2Nov 13, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV16 citations80
US7289858B2Oct 30, 2007
Lithographic motion control system and method
ASML NETHERLANDS BV14 citations80
US7016019B2Mar 21, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations71
US7679719B2Mar 16, 2010
Lithographic apparatus having a drive system with coordinate transformation, and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7446854B2Nov 4, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations49
US7294844B2Nov 13, 2007
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations49
US7224428B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations33