Inventor
OSUDA HIROSHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OSUDA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
7 patentsUS7052599B2May 30, 2006
Method and apparatus for reuse of abrasive fluid used in the manufacture of semiconductors
FUJITSU LTD23 citations91
US6656359B1Dec 2, 2003
Method and apparatus for reuse of abrasive fluid used in the manufacture of semiconductors
FUJITSU LTD34 citations91
US6508915B1Jan 21, 2003
Apparatus and method for distilling waste liquids
FUJITSU LTD24 citations91
US7419946B2Sep 2, 2008
Chemical solution feeding apparatus and method for preparing slurry
FUJITSU LTD10 citations82
US7144552B1Dec 5, 2006
Method and apparatus for preparing chemical solutions
FUJITSU LTD18 citations82
US7232504B2Jun 19, 2007
Apparatus and method for distilling waste liquids
FUJITSU LTD2 citations61
US7183117B2Feb 27, 2007
Apparatus for measuring characteristics of chemical solution, chemical solution supply apparatus, and method for measuring concentration of chemical solution
FUJITSU LTD3 citations61