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Inventor
OKA HIROMI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “OKA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patents
US7432172B2
Oct 7, 2008
Plasma etching method
TOKYO ELECTRON LTD
2 citations
60
US7179752B2
Feb 20, 2007
Dry etching method
TOKYO ELECTRON LTD
1 citations
49
SUMITOMO CHEMICAL CO
1 patent
US5585218A
Dec 17, 1996
Photoresist composition containing alkyletherified polyvinylphenol
SUMITOMO CHEMICAL CO
24 citations
90
TOSHIBA KK
1 patent
US7304452B2
Dec 4, 2007
Motor control device
TOSHIBA KK
52 citations
89