Inventor

YAMAGISHI TAKANORI

JP18 patents

⚠️ This page may combine multiple inventors who share the name “YAMAGISHI TAKANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAMAGISHI TAKANORI

MARUZEN PETROCHEM CO LTD

Thiol compound, copolymer and method for producing the copolymer

Process for the preparation of p-ethylphenol

Copolymer for semiconductor lithography and process for producing the same

Production process of copolymer for semiconductor lithography

Method for prevention of increase in particles in copolymer for semiconductor resist

Preparation process of copolymer for semiconductor lithography and a copolymer for semiconductor lithography available by this process

Copolymer for semiconductor lithography and process for production thereof

Copolymer for semiconductor lithography and producing method thereof, and composition

Thiol compound, copolymer and method for producing the copolymer

Process for producing polymer for semiconductor lithography

Method for producing a copolymer solution with a uniform concentration for semiconductor lithography

YAMAGISHI TAKANORI

Resist polymer solution and process for producing the same

Copolymer for immersion lithography and compositions

Resist polymer and method for producing the polymer

IIJIMA MINORU

Copolymer for positive type lithography, polymerization initiator used in production of said copolymer, and composition for semiconductor lithography

Copolymer for positive type lithography, polymerization initiator used in production of said copolymer, and composition for semiconductor lithography

TOKYO OHKA KOGYO CO LTD

Positive resist composition and method of forming resist pattern

OIKAWA TOMO

Copolymer and composition for semiconductor lithography and process for producing the copolymer