Inventor

LUTTIKHUIS BERNARDUS ANTONIUS JOHANNES

NL8 patents

⚠️ This page may combine multiple inventors who share the name “LUTTIKHUIS BERNARDUS ANTONIUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US10209634B2Feb 19, 2019

LOOPSTRA ERIK ROELOF

2 patents

US8289498B2Oct 16, 2012

Lithographic apparatus and device manufacturing method

LOOPSTRA ERIK ROELOF1 citations45

US8264670B2Sep 11, 2012

Lithographic apparatus and device manufacturing method for clamping a patterning device

LOOPSTRA ERIK ROELOF0 citations39

JACOBS HERNES

1 patent

US8411252B2Apr 2, 2013

Lithographic apparatus and device manufacturing method utilizing a substrate handler

JACOBS HERNES0 citations47

ASML NETHERLAND BV

1 patent

US7804584B2Sep 28, 2010

Integrated circuit manufacturing methods with patterning device position determination

ASML NETHERLAND BV0 citations47

VAN DER SCHOOT HARMEN KLAAS

1 patent

US8174680B2May 8, 2012

Substrate handler, lithographic apparatus and device manufacturing method

VAN DER SCHOOT HARMEN KLAAS0 citations42