Inventor
MIZUNO NORIKAZU
JP32 patents
⚠️ This page may combine multiple inventors who share the name “MIZUNO NORIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
15 patentsUS7779785B2Aug 24, 2010
Production method for semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC21 citations92
US8039404B2Oct 18, 2011
Production method for semiconductor device
HITACHI INT ELECTRIC INC9 citations84
US6790793B2Sep 14, 2004
Method for manufacturing semiconductor device
HITACHI INT ELECTRIC INC13 citations84
US7767594B2Aug 3, 2010
Semiconductor device producing method
HITACHI INT ELECTRIC INC9 citations83
US6720274B2Apr 13, 2004
Method for fabricating a semiconductor device and a substrate processing apparatus
HITACHI INT ELECTRIC INC8 citations74
US9334567B2May 10, 2016
Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus
HITACHI INT ELECTRIC INC3 citations73
US9548198B2Jan 17, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC4 citations72
US9343290B2May 17, 2016
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC6 citations72
US9217199B2Dec 22, 2015
Substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations63
US9263251B2Feb 16, 2016
Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations62
US7662727B2Feb 16, 2010
Method for manufacturing semiconductor device background
HITACHI INT ELECTRIC INC2 citations62
US8349544B2Jan 8, 2013
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations52
US7892983B2Feb 22, 2011
Substrate processing apparatus and producing method of semiconductor device
HITACHI INT ELECTRIC INC1 citations52
US9123531B2Sep 1, 2015
Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations51
US9396929B2Jul 19, 2016
Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium
HITACHI INT ELECTRIC INC0 citations39
KOKUSAI ELECTRIC CORP
5 patentsUS11705325B2Jul 18, 2023
Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP1 citations71
US12142476B2Nov 12, 2024
Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US11527401B2Dec 13, 2022
Method of processing substate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US12148614B2Nov 19, 2024
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations58
US12170206B2Dec 17, 2024
Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations57
MIZUNO NORIKAZU
4 patentsUS8557716B2Oct 15, 2013
Semiconductor device manufacturing method and substrate processing apparatus
MIZUNO NORIKAZU5 citations71
US8535479B2Sep 17, 2013
Manufacturing method of semiconductor device, and semiconductor device
MIZUNO NORIKAZU2 citations61
US8093159B2Jan 10, 2012
Manufacturing method of semiconductor device, and semiconductor device
MIZUNO NORIKAZU3 citations61
US8847343B2Sep 30, 2014
Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus
MIZUNO NORIKAZU0 citations50
KOKUSAI ELECTRIC CO LTD
3 patentsUS6486083B1Nov 26, 2002
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CO LTD74 citations96
US6716772B2Apr 6, 2004
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CO LTD7 citations74
US7432215B2Oct 7, 2008
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CO LTD0 citations52