Inventor
HOSHI NAOTSUGU
US8 patents
⚠️ This page may combine multiple inventors who share the name “HOSHI NAOTSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11251052B2Feb 15, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations67
US7799703B2Sep 21, 2010
Processing method and storage medium
TOKYO ELECTRON LTD3 citations61
US7964511B2Jun 21, 2011
Plasma ashing method
TOKYO ELECTRON LTD1 citations50
US10316835B2Jun 11, 2019
Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus
TOKYO ELECTRON LTD0 citations33