Inventor

HARB SALAM

US11 patents

⚠️ This page may combine multiple inventors who share the name “HARB SALAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

5 patents

US7919193B1Apr 5, 2011

Shielding, particulate reducing high vacuum components

KLA TENCOR CORP2 citations62

US10953441B2Mar 23, 2021

System and method for cleaning optical surfaces of an extreme ultraviolet optical system

KLA TENCOR CORP1 citations60

US9879684B2Jan 30, 2018

Apparatus and method for shielding a controlled pressure environment

KLA TENCOR CORP0 citations51

US9141002B2Sep 22, 2015

Z-stage with dynamically driven stage mirror and chuck assembly having constraint

KLA TENCOR CORP0 citations47

US9874512B2Jan 23, 2018

Method and system for gas flow mitigation of molecular contamination of optics

KLA TENCOR CORP0 citations35

TAHMASSEBPUR MOHAMMED

2 patents

US8169768B1May 1, 2012

Electrostatic chuck

TAHMASSEBPUR MOHAMMED7 citations80

US8092927B2Jan 10, 2012

Shielding, particulate reducing high vacuum components

TAHMASSEBPUR MOHAMMED0 citations49

KLA TENCOR TECH CORP

2 patents

US7800735B2Sep 21, 2010

Z-stage with dynamically driven stage mirror and chuck assembly

KLA TENCOR TECH CORP3 citations56

US7566873B1Jul 28, 2009

High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus

KLA TENCOR TECH CORP2 citations55

JIANG XINRONG

1 patent

US8664594B1Mar 4, 2014

Electron-optical system for high-speed and high-sensitivity inspections

JIANG XINRONG120 citations96

HARB SALAM

1 patent

US8390789B2Mar 5, 2013

Z-stage with dynamically driven stage mirror and chuck assembly

HARB SALAM2 citations50