Inventor

DOUGLAS KENT

US3 patents

⚠️ This page may combine multiple inventors who share the name “DOUGLAS KENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

1 patent

US7800735B2Sep 21, 2010

Z-stage with dynamically driven stage mirror and chuck assembly

KLA TENCOR TECH CORP3 citations56

HARB SALAM

1 patent

US8390789B2Mar 5, 2013

Z-stage with dynamically driven stage mirror and chuck assembly

HARB SALAM2 citations50

KLA TENCOR CORP

1 patent

US9141002B2Sep 22, 2015

Z-stage with dynamically driven stage mirror and chuck assembly having constraint

KLA TENCOR CORP0 citations47