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Inventor
BAEK SE-KYUNG
KR
3 patents
⚠️ This page may combine multiple inventors who share the name “BAEK SE-KYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patents
US9437452B2
Sep 6, 2016
Method of forming a fine pattern by using block copolymers
SAMSUNG ELECTRONICS CO LTD
4 citations
71
US7527913B2
May 5, 2009
Photoacid generators, photoresist composition including the same and method of forming pattern using the same
SAMSUNG ELECTRONICS CO LTD
7 citations
71
YUN HYO-JIN
1 patent
US8871423B2
Oct 28, 2014
Photoresist composition for fabricating probe array, method of fabricating probe array using the photoresist composition, composition for photosensitive type developed bottom anti-reflective coating, fabricating method of patterns using the same and fabricating method of semiconductor device using the same
YUN HYO-JIN
6 citations
66