Inventor
THIRUNAVUKARASU SRISKANTHARAJAH
SG36 patents
⚠️ This page may combine multiple inventors who share the name “THIRUNAVUKARASU SRISKANTHARAJAH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
35 patentsUS10784134B2Sep 22, 2020
Image based substrate mapper
APPLIED MATERIALS INC2 citations72
US9845533B2Dec 19, 2017
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity
APPLIED MATERIALS INC3 citations71
US9595464B2Mar 14, 2017
Apparatus and method for reducing substrate sliding in process chambers
APPLIED MATERIALS INC2 citations71
US11053590B2Jul 6, 2021
Nozzle for uniform plasma processing
APPLIED MATERIALS INC3 citations70
US10465288B2Nov 5, 2019
Nozzle for uniform plasma processing
APPLIED MATERIALS INC4 citations70
US10504762B2Dec 10, 2019
Bridging front opening unified pod (FOUP)
APPLIED MATERIALS INC2 citations69
US10446423B2Oct 15, 2019
Next generation warpage measurement system
APPLIED MATERIALS INC4 citations69
US9478697B2Oct 25, 2016
Reusable substrate carrier
APPLIED MATERIALS INC3 citations69
US10325790B2Jun 18, 2019
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC3 citations67
US10903055B2Jan 26, 2021
Edge ring for bevel polymer reduction
APPLIED MATERIALS INC4 citations66
US11721583B2Aug 8, 2023
Mainframe-less wafer transfer platform with linear transfer system for wafer processing modules
APPLIED MATERIALS INC0 citations61
US11302549B2Apr 12, 2022
Substrate vacuum transport and storage apparatus
APPLIED MATERIALS INC0 citations61
US11111583B2Sep 7, 2021
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity
APPLIED MATERIALS INC0 citations61
US10978334B2Apr 13, 2021
Sealing structure for workpiece to substrate bonding in a processing chamber
APPLIED MATERIALS INC0 citations61
US10566226B2Feb 18, 2020
Multi-cassette carrying case
APPLIED MATERIALS INC1 citations61
US10930542B2Feb 23, 2021
Apparatus for handling various sized substrates
APPLIED MATERIALS INC1 citations59
US12437999B2Oct 7, 2025
Methods and apparatus for mask patterning debris removal
APPLIED MATERIALS INC0 citations58
US12068159B2Aug 20, 2024
Methods and apparatus for mask patterning debris removal
APPLIED MATERIALS INC0 citations58
US11309278B2Apr 19, 2022
Methods for bonding substrates
APPLIED MATERIALS INC1 citations57
US11421316B2Aug 23, 2022
Methods and apparatus for controlling warpage in wafer level packaging processes
APPLIED MATERIALS INC1 citations56
US11739411B2Aug 29, 2023
Lattice coat surface enhancement for chamber components
APPLIED MATERIALS INC0 citations55
US11177146B2Nov 16, 2021
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC1 citations55
US10154586B2Dec 11, 2018
Apparatus and method for solid state source array design and fabrication
APPLIED MATERIALS INC0 citations52
US11342226B2May 24, 2022
Hybrid wafer dicing approach using an actively-focused laser beam laser scribing process and plasma etch process
APPLIED MATERIALS INC0 citations51
US10549324B2Feb 4, 2020
Method and apparatus for backside cleaning of substrates
APPLIED MATERIALS INC0 citations51
US10347516B2Jul 9, 2019
Substrate transfer chamber
APPLIED MATERIALS INC0 citations51
US10153187B2Dec 11, 2018
Methods and apparatus for transferring a substrate
APPLIED MATERIALS INC1 citations51
US9993853B2Jun 12, 2018
Method and apparatus for backside cleaning of substrates
APPLIED MATERIALS INC0 citations51
US9960023B2May 1, 2018
Methods and apparatus for nodule control in a titanium-tungsten target
APPLIED MATERIALS INC0 citations51
US10607870B2Mar 31, 2020
Substrate carrier for active/passive bonding and de-bonding of a substrate
APPLIED MATERIALS INC0 citations50
US10262877B2Apr 16, 2019
Apparatus and method for reducing substrate sliding in process chambers
APPLIED MATERIALS INC0 citations50
US9818624B2Nov 14, 2017
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC1 citations49
US11871667B2Jan 9, 2024
Methods and apparatus for warpage correction
APPLIED MATERIALS INC0 citations43
US10847400B2Nov 24, 2020
Adhesive-less substrate bonding to carrier plate
APPLIED MATERIALS INC0 citations43
US10777442B2Sep 15, 2020
Hybrid substrate carrier
APPLIED MATERIALS INC0 citations42