Inventor
ELUMALAI KARTHIK
IN11 patents
⚠️ This page may combine multiple inventors who share the name “ELUMALAI KARTHIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS9845533B2Dec 19, 2017
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity
APPLIED MATERIALS INC3 citations71
US10446423B2Oct 15, 2019
Next generation warpage measurement system
APPLIED MATERIALS INC4 citations69
US9478697B2Oct 25, 2016
Reusable substrate carrier
APPLIED MATERIALS INC3 citations69
US10325790B2Jun 18, 2019
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC3 citations67
US11721583B2Aug 8, 2023
Mainframe-less wafer transfer platform with linear transfer system for wafer processing modules
APPLIED MATERIALS INC0 citations61
US11111583B2Sep 7, 2021
Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity
APPLIED MATERIALS INC0 citations61
US11600492B2Mar 7, 2023
Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process
APPLIED MATERIALS INC0 citations56
US11421316B2Aug 23, 2022
Methods and apparatus for controlling warpage in wafer level packaging processes
APPLIED MATERIALS INC1 citations56
US12463075B2Nov 4, 2025
Cathode assembly for integration of embedded electrostatic chuck (ESC)
APPLIED MATERIALS INC0 citations53
US9818624B2Nov 14, 2017
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC1 citations49