Inventor
SUMINO TASUKU
JP4 patents
Patents
4 patentsUS11387332B2Jul 12, 2022
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations53
US10388585B2Aug 20, 2019
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations47
US9627282B2Apr 18, 2017
Method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations47
US10790397B2Sep 29, 2020
Semiconductor device and method for manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations46