Inventor
ENDO MASATOSHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “ENDO MASATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
5 patentsUS9946169B2Apr 17, 2018
Exposure apparatus and device manufacturing method
CANON KK16 citations82
US10031429B2Jul 24, 2018
Method of obtaining position, exposure method, and method of manufacturing article
CANON KK3 citations63
US9195129B2Nov 24, 2015
Substrate holding device, lithography apparatus using same, and device manufacturing method
CANON KK3 citations61
US10635005B2Apr 28, 2020
Exposure apparatus, method thereof, and method of manufacturing article
CANON KK0 citations49
US9665018B2May 30, 2017
Measuring apparatus, measuring method, lithography apparatus, and article manufacturing method
CANON KK0 citations34