Inventor

KAZAANA TETSUJI

JP2 patents

Patents

2 patents

US10031429B2Jul 24, 2018

Method of obtaining position, exposure method, and method of manufacturing article

CANON KK3 citations63

US7829263B2Nov 9, 2010

Exposure method and apparatus, coating apparatus for applying resist to plural substrates, and device manufacturing method

CANON KK0 citations28