Inventor

LARSEN III RULON J

US7 patents

⚠️ This page may combine multiple inventors who share the name “LARSEN III RULON J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV SOUTHERN CALIFORNIA

4 patents

US10641792B2May 5, 2020

Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties

UNIV SOUTHERN CALIFORNIA18 citations94

US10215775B2Feb 26, 2019

Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties

UNIV SOUTHERN CALIFORNIA23 citations94

US9671429B2Jun 6, 2017

Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties

UNIV SOUTHERN CALIFORNIA17 citations92

US11630127B2Apr 18, 2023

Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties

UNIV SOUTHERN CALIFORNIA1 citations62

MICROFABRICA INC

3 patents

US9919472B1Mar 20, 2018

Stacking and bonding methods for forming multi-layer, three-dimensional, millimeter scale and microscale structures

MICROFABRICA INC11 citations84

US10297421B1May 21, 2019

Plasma etching of dielectric sacrificial material from reentrant multi-layer metal structures

MICROFABRICA INC3 citations72

US11211228B1Dec 28, 2021

Neutral radical etching of dielectric sacrificial material from reentrant multi-layer metal structures

MICROFABRICA INC0 citations61