Inventor
KAMATH SANJAY
US15 patents
⚠️ This page may combine multiple inventors who share the name “KAMATH SANJAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS9362107B2Jun 7, 2016
Flowable low-k dielectric gapfill treatment
APPLIED MATERIALS INC430 citations98
US7967913B2Jun 28, 2011
Remote plasma clean process with cycled high and low pressure clean steps
APPLIED MATERIALS INC477 citations98
US10410869B2Sep 10, 2019
CVD based oxide-metal multi structure for 3D NAND memory devices
APPLIED MATERIALS INC8 citations84
US7799704B2Sep 21, 2010
Gas baffle and distributor for semiconductor processing chamber
APPLIED MATERIALS INC15 citations84
US7740706B2Jun 22, 2010
Gas baffle and distributor for semiconductor processing chamber
APPLIED MATERIALS INC19 citations84
US7704897B2Apr 27, 2010
HDP-CVD SiON films for gap-fill
APPLIED MATERIALS INC7 citations68
US11817320B2Nov 14, 2023
CVD based oxide-metal multi structure for 3D NAND memory devices
APPLIED MATERIALS INC0 citations62
US11430654B2Aug 30, 2022
Initiation modulation for plasma deposition
APPLIED MATERIALS INC0 citations61
US11270903B2Mar 8, 2022
Multi zone electrostatic chuck
APPLIED MATERIALS INC0 citations61
US12451345B2Oct 21, 2025
PECVD of SiBN thin films with low leakage current
APPLIED MATERIALS INC0 citations59
US12040210B2Jul 16, 2024
Multi-pressure bipolar electrostatic chucking
APPLIED MATERIALS INC0 citations56
US11817313B2Nov 14, 2023
Methods for pressure ramped plasma purge
APPLIED MATERIALS INC0 citations50
US11157661B2Oct 26, 2021
Process development visualization tool
APPLIED MATERIALS INC0 citations49