Inventor
Chubun Nikolai
US5 patents
⚠️ This page may combine multiple inventors who share the name “Chubun Nikolai”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
3 patentsUS11508591B2Nov 22, 2022
High resolution electron beam apparatus with dual-aperture schemes
KLA CORP0 citations61
US12451319B2Oct 21, 2025
Electron source with magnetic suppressor electrode
KLA CORP0 citations60
US11830699B2Nov 28, 2023
Cold-field-emitter electron gun with self-cleaning extractor using reversed e-beam current
KLA CORP0 citations56