Inventor
TAKAI RYO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TAKAI RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
6 patentsUS6819433B2Nov 16, 2004
Exposure apparatus including interferometer system
CANON KK71 citations96
US9804510B2Oct 31, 2017
Interferometer system, lithography apparatus, and article manufacturing method
CANON KK12 citations79
US10481509B2Nov 19, 2019
Vibration damping apparatus, lithography apparatus, and method of manufacturing article
CANON KK0 citations51
US9217937B2Dec 22, 2015
Interferometric measurement of rotation of stage apparatus and adjustment method thereof, exposure apparatus and method of manufacturing device
CANON KK0 citations50
US12366812B2Jul 22, 2025
Detection apparatus, detection method, exposure apparatus and article manufacturing method
CANON KK0 citations47
US10197926B2Feb 5, 2019
Exposure apparatus and method of manufacturing article
CANON KK0 citations38