Inventor
LIU SHUWEI
SG25 patents
⚠️ This page may combine multiple inventors who share the name “LIU SHUWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
24 patentsUS11249388B2Feb 15, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC6 citations74
US11300871B2Apr 12, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC3 citations72
US11720013B2Aug 8, 2023
Graded interface in Bragg reflector
APPLIED MATERIALS INC0 citations62
US11675263B2Jun 13, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11644741B2May 9, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11609490B2Mar 21, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11592738B2Feb 28, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11513437B2Nov 29, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11327394B2May 10, 2022
Graded interface in bragg reflector
APPLIED MATERIALS INC0 citations62
US11300872B2Apr 12, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11275302B2Mar 15, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11275304B2Mar 15, 2022
Extreme ultraviolet mask absorber matertals
APPLIED MATERIALS INC0 citations62
US11275303B2Mar 15, 2022
Extreme ultraviolet mask absorber matertals
APPLIED MATERIALS INC0 citations62
US11249389B2Feb 15, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations62
US11194244B2Dec 7, 2021
Extreme ultraviolet mask absorber and processes for manufacture
APPLIED MATERIALS INC0 citations62
US11860533B2Jan 2, 2024
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations61
US11630385B2Apr 18, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations61
US11556053B2Jan 17, 2023
Extreme ultraviolet mask blank hard mask materials
APPLIED MATERIALS INC0 citations61
US11537040B2Dec 27, 2022
Extreme ultraviolet mask blank hard mask materials
APPLIED MATERIALS INC0 citations61
US11249390B2Feb 15, 2022
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations61
US11209727B2Dec 28, 2021
Ta—Cu alloy material for extreme ultraviolet mask absorber
APPLIED MATERIALS INC0 citations61
US11640109B2May 2, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations58
US11275300B2Mar 15, 2022
Extreme ultraviolet mask blank defect reduction
APPLIED MATERIALS INC0 citations54
US11365475B2Jun 21, 2022
Physical vapor deposition chamber cleaning processes
APPLIED MATERIALS INC0 citations51