Inventor
KAWANO DAISUKE
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KAWANO DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS10948317B2Mar 16, 2021
Measuring device and method for obtaining amount of deviation of measuring device
TOKYO ELECTRON LTD4 citations70
US10903100B2Jan 26, 2021
Method of obtaining amount of deviation of a measuring device, and method of calibrating transfer position data in a processing system
TOKYO ELECTRON LTD3 citations70
US11380568B2Jul 5, 2022
Transfer method and transfer system
TOKYO ELECTRON LTD0 citations60
US10861729B2Dec 8, 2020
Transfer method and transfer system
TOKYO ELECTRON LTD0 citations50
US11164729B2Nov 2, 2021
Measuring device and operation method of system for inspecting focus ring
TOKYO ELECTRON LTD0 citations49
US11519948B2Dec 6, 2022
Measuring device and method
TOKYO ELECTRON LTD0 citations47