Inventor
PAULSON WAYNE M
US10 patents
⚠️ This page may combine multiple inventors who share the name “PAULSON WAYNE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
9 patentsUS4997790AMar 5, 1991
Process for forming a self-aligned contact structure
MOTOROLA INC120 citations97
US5918147AJun 29, 1999
Process for forming a semiconductor device with an antireflective layer
MOTOROLA INC89 citations95
US5037777AAug 6, 1991
Method for forming a multi-layer semiconductor device using selective planarization
MOTOROLA INC69 citations95
US4956314ASep 11, 1990
Differential etching of silicon nitride
MOTOROLA INC53 citations95
US6218200B1Apr 17, 2001
Multi-layer registration control for photolithography processes
MOTOROLA INC71 citations92
US4591821AMay 27, 1986
Chromium-silicon-nitrogen thin film resistor and apparatus
MOTOROLA INC33 citations92
US4510178AApr 9, 1985
Thin film resistor material and method
MOTOROLA INC34 citations92
US4392992AJul 12, 1983
Chromium-silicon-nitrogen resistor material
MOTOROLA INC42 citations92
US4717588AJan 5, 1988
Metal redistribution by rapid thermal processing
MOTOROLA INC12 citations73