Inventor
Li shang-sheng
TW11 patents
⚠️ This page may combine multiple inventors who share the name “Li shang-sheng”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS9536759B2Jan 3, 2017
Baking apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD168 citations97
US9855579B2Jan 2, 2018
Spin dispenser module substrate surface protection system
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations79
US9793143B2Oct 17, 2017
Semiconductor processing apparatus and method of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US12581897B2Mar 17, 2026
Liquid storage for facility chemical supply system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11769678B2Sep 26, 2023
Liquid storage for facility chemical supply system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12130553B2Oct 29, 2024
Resist pump buffer tank and method of resist defect reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11835861B2Dec 5, 2023
Resist pump buffer tank and method of resist defect reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11806743B2Nov 7, 2023
Spin dispenser module substrate surface protection system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11344910B2May 31, 2022
Spin dispenser module substrate surface protection system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12593390B2Mar 31, 2026
Electrostatic discharge prevention pump
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51