Inventor
SHIMADA RYO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SHIMADA RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS9362150B2Jun 7, 2016
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations44
US10747121B2Aug 18, 2020
Optical processing apparatus and substrate processing apparatus
TOKYO ELECTRON LTD0 citations37
US10558125B2Feb 11, 2020
Exposure apparatus, exposure apparatus adjustment method and storage medium
TOKYO ELECTRON LTD0 citations37
US10877376B2Dec 29, 2020
Light irradiating device
TOKYO ELECTRON LTD0 citations36