Inventor
SHON JONG WON
KR6 patents
⚠️ This page may combine multiple inventors who share the name “SHON JONG WON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
5 patentsUS10190214B2Jan 29, 2019
Deposition apparatus and deposition system having the same
ASM IP HOLDING BV378 citations98
US10876218B2Dec 29, 2020
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
ASM IP HOLDING BV2 citations72
US10738381B2Aug 11, 2020
Thin film deposition apparatus
ASM IP HOLDING BV2 citations71
US12270118B2Apr 8, 2025
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
ASM IP HOLDING BV0 citations61
US11965262B2Apr 23, 2024
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
ASM IP HOLDING BV0 citations61