Inventor
AN WOUNG-KWAN
KR6 patents
Patents
6 patentsUS6033135AMar 7, 2000
Development system for manufacturing semiconductor devices, including a container equipped with cleaning and ventillation apparatus, and controlling method thereof
SAMSUNG ELECTRONICS CO LTD25 citations91
US5930549AJul 27, 1999
Developing device for semiconductor device fabrication and its controlling method
SAMSUNG ELECTRONICS CO LTD28 citations90
US5472554ADec 5, 1995
Apparatus for adhering masking film
SAMSUNG ELECTRONICS CO LTD25 citations89
US5688354ANov 18, 1997
Method for adhering masking film
SAMSUNG ELECTRONICS CO LTD12 citations71
US5872365AFeb 16, 1999
UV irradiation apparatus
SAMSUNG ELECTRONICS CO LTD16 citations66
US5899690AMay 4, 1999
Thermal processing apparatus for semiconductor wafer
SAMSUNG ELECTRONICS CO LTD3 citations60