Inventor
ONUKI TETSUJI
JP6 patents
Patents
6 patentsUS5656769AAug 12, 1997
Scanning probe microscope
NIKON CORP71 citations95
US5929438AJul 27, 1999
Cantilever and measuring apparatus using it
NIKON CORP127 citations94
US5508517AApr 16, 1996
Scanning probe type microscope apparatus
NIKON CORP46 citations92
US5360977ANov 1, 1994
Compound type microscope
NIKON CORP52 citations92
US5986760ANov 16, 1999
Shape measurement method and high-precision lens manufacturing process
NIKON CORP23 citations90
US5317153AMay 31, 1994
Scanning probe microscope
NIKON CORP25 citations90