Inventor
LEE SE-HYEONG
KR7 patents
Patents
7 patentsUS6319824B1Nov 20, 2001
Method of forming a contact hole in a semiconductor device
SAMSUNG ELECTRONICS CO LTD35 citations90
US6177309B1Jan 23, 2001
Methods of forming integrated circuit capacitors having merged annular storage electrodes therein
SAMSUNG ELECTRONICS CO LTD25 citations90
US6074519AJun 13, 2000
Plasma etching apparatus having a sealing member coupling an upper electrode to an etching chamber
SAMSUNG ELECTRONICS CO LTD20 citations89
US6097055AAug 1, 2000
Capacitor and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD18 citations83
US7571626B2Aug 11, 2009
Drum washing machine
SAMSUNG ELECTRONICS CO LTD10 citations82
US6436812B1Aug 20, 2002
Method of manufacturing a semiconductor device using anti-reflective layer and self-aligned contact technique and semiconductor device manufactured thereby
SAMSUNG ELECTRONICS CO LTD10 citations71
US6238970B1May 29, 2001
Method for fabricating a DRAM cell capacitor including etching upper conductive layer with etching byproduct forming an etch barrier on the conductive pattern
SAMSUNG ELECTRONICS CO LTD2 citations61